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R. Gassilloud

universite grenoble alpes and cea

16H指数
104论文数
975被引数
收录论文 17
发表时间
Growth of c-axis AlN sputtered films on silicon-based substrates using 2D-TMD as nucleation layer使用二维TMD作为成核层在硅基衬底上生长c轴取向的AlN溅射薄膜
err2026-02-20
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errOAAI
errJ Patouillard; N Vaxelaire; M Bernard; R Gassilloud; A Dussaigne; B Hyot; S Cadot; N Bernier; A Mantoux; E Blanquet; C Raynaud; F Gianesello
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Pursuing the FD-SOI roadmap down to 10 nm and 7 nm nodes for high energy efficient, low power and RF/mmWave applications
err2025-10-01
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errOAAI
errFenouillet-Beranger, C.; Rozeau, O.; Chouk, R.; Cueto, O.; Royet, A. -S; Charbonneau, M.; Mohamad, B.; Brevard, L.; Chalupa, Z.; Bond, A.; Baudin, F.; Brunet, L.; Rodriguez, P.; Gassilloud, R.; Mota-Frutuoso, T.; Pimenta-Barros, P.; Beaurepaire, S.; Lapras, V.; Kanyandekwe, J.; Petitprez, E.; Brianceau, P.; Segaud, R.; Verrun, S.; Barge, D.; Chausse, P.; Billoint, O.; Vandendaele, W.; Romanjek, K.; Loup, V.; Hartmann, J-M; Magalhaes-Lucas, A.; Garnier, G.; Souhaite, A.; Cibrario, G.; Duriez, B.; Poiroux, T.; Cyrille, M-C; Noguet, D.
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Thermochemical treatment of sputtered-AlN/2D MoS2 seed layers: a new elaboration process of highly c-axis AlN films溅射-AlN/二维MoS2籽晶层的 thermochemical treatment:一种制备高度c轴取向AlN薄膜的新 elaboration process
err2025-04-03
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errPatouillard, J.; Gassilloud, R.; Mercier, F.; Dussaigne, A.; Hyot, B.; Bernard, M.; Cadot, S.; Gauthier, N.; Vaxelaire, N.; Bernier, N.; Martin, F.; Raynaud, C.; Gianesello, F.; Mantoux, A.; Blanquet, E.
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Area selective deposition using alternate deposition and etch super-cycle strategies
err2022-01-01
err12
PREAI
errBonvalot, Marceline; Vallee, Christophe; Mannequin, Cedric; Jaffal, Moustapha; Gassilloud, Remy; Posseme, Nicolas; Chevolleau, Thierry
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Topographically selective deposition
err2019-01-28
err14
PREAI
errChaker, A.; Vallee, C.; Pesce, V.; Belahcen, S.; Vallat, R.; Gassilloud, R.; Posseme, N.; Bonvalot, M.; Bsiesy, A.
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Chemistry of resistivity changes in TiTe/Al2O3 conductive-bridge memories
err2018-12-18
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errOAAI
errMendes, M. Kazar; Martinez, E.; Ablett, J. M.; Veillerot, M.; Gassilloud, R.; Bernard, M.; Renault, O.; Rueff, J. P.; Barrett, N.
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Forming mechanism of Te-based conductive-bridge memories
err2018-02-01
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errOAAI
errMendes, M. Kazar; Martinez, E.; Marty, A.; Veillerot, M.; Yamashita, Y.; Gassilloud, R.; Bernard, M.; Renault, O.; Barrett, N.
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Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C-V
err2014-06-01
err31
PREAI
errPiallat, Fabien; Beugin, Virginie; Gassilloud, Remy; Dussault, Laurent; Pelissier, Bernard; Leroux, Charles; Caubet, Pierre; Vallee, Christophe
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A study of nitrogen behavior in the formation of Ta/TaN and Ti/TaN alloyed metal electrodes on SiO2 and HfO2 dielectrics
err2014-04-07
err6
PREAI
errGassilloud, R.; Maunoury, C.; Leroux, C.; Piallat, F.; Saidi, B.; Martin, F.; Maitrejean, S.
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Stacking fault generation during relaxation of silicon germanium on insulator layers obtained by the Ge condensation technique
err2007-02-12
err48
PREAI
errVincent, B.; Damlencourt, J. -F.; Delaye, V.; Gassilloud, R.; Clavelier, L.; Morand, Y.
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Plastic deformation modes of gallium arsenide in nanoindentation and nanoscratching
err2007-01-16
err46
errOAAI
errWasmer, K.; Parlinska-Wojtan, M.; Gassilloud, R.; Pouvreau, C.; Tharian, J.; Micher, J.
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Cleavage fracture of brittle semiconductors from the nanometer to the centimeter scale
err2005-05-31
err52
errOAAI
errWasmer, K; Ballif, C; Gassilloud, R; Pouvreau, C; Rabe, R; Michler, J; Breguet, JM; Solletti, JM; Karimi, A; Schulz, D
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