arrow
返回
H

Hyeonsu Roh

Sejong University

5H指数
11论文数
67被引数
收录论文 4
发表时间
Preparation of tungsten-based thin films using a F-free W precursor and tert-butyl hydrazine via 2-and 3-step atomic layer deposition process
err2022-03-01
err4
PREAI
errLee, Jin-Hyeok; Hidayat, Romel; Ramesh, Rahul; Roh, Hyeonsu; Nandi, Dip K.; Lee, Won-Jun; Kim, Soo-Hyun
err分享
err收藏
Atomic layer deposition of titanium oxide thin films using a titanium precursor with a linked amido-cyclopentadienyl ligand
err2022-01-01
err12
PREAI
errKim, Seongyoon; Hidayat, Romel; Roh, Hyeonsu; Kim, Jaemin; Kim, Hye-Lee; Khumaini, Khabib; Park, Mira; Seok, Jang-Hyeon; Park, Jung Woo; Lee, Won-Jun
err分享
err收藏
Atomic layer deposition of silicon oxide films using bis(dimethylaminomethylsilyl)trimethylsilylamine and ozone: first-principles and experimental study
err2022-01-01
err5
PREAI
errChoi, Yeongchan; Son, Heeju; Khumaini, Khabib; Han, Hyunmin; Roh, Hyeonsu; Kim, Hye-Lee; Lee, Sang-Ick; Lee, Won-Jun
err分享
err收藏