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收藏Small and Simple Molecular Structure Based Thermally Stable Ruthenium Precursor in Advancing Ruthenium ALD Process for Scaled Interconnect Metallization基于小而简单分子结构的热稳定钌前驱体在推进钌ALD工艺用于缩放互连金属化中的应用
Nakatsubo, Hideaki; Mohapatra, Debananda; Lee, Eun-Soo; Kim, Jeongha; Cho, Iaan; Iseki, Masato; Shigetomi, Toshiyuki; Harada, Ryosuke; Na, Sang-Woong; Cheon, Taehoon; Shong, Bonggeun; Kim, Soo-Hyun
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收藏Enhancing selectivity and sensitivity in gas sensors through noble metal-decorated ZnO and machine learning
Kwon, Yeong Min; Son, Yeseul; Lee, Do Hyung; Lim, Min Hyeok; Han, Jin Kyu; Jang, Moonjeong; Park, Seoungwoong; Kang, Saewon; Yim, Soonmin; Myung, Sung; Lim, Jongsun; Lee, Sun Sook; Bae, Garam; Kim, Soo-Hyun; Song, Wooseok
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收藏Layer-by-layer NH3 plasma treatment for area-selective atomic layer deposition of high-quality SiO2 thin films逐层NH3等离子体处理用于区域选择性原子层沉积高质量SiO2薄膜
Lee, Sanghun; Seo, Seunggi; Kim, Tae Hyun; Yoon, Hwi; Park, Seonyeong; Na, Seunggyu; Seo, Jeongwoo; Kim, Soo-Hyun; Chung, Seung-min; Kim, Hyungjun
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收藏Facile formation of nanoporous reduced graphene oxide via epoxy-based negative photoresist laser irradiation for highly sensitive and selective gas detection
Yang, Min Seok; Bae, Sung-Kuk; Seo, Dong-Bum; Lee, Kichul; Son, Yeseul; Kim, Soo-Hyun; Jung, Jae-Hwan; An, Ki-Seok; Park, Inkyu; Seo, Jung Hwan
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