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Seo‐Hyun Lee

korea university

10H指数
56论文数
579被引数
收录论文 6
发表时间
Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching采用协同原子层沉积与刻蚀技术制备超薄钌薄膜
err2025-03-21
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PREAI
errJeongbin Lee; Jung-Tae Kim; Jieun Oh; Dongjun Lee; Seo-Hyun Lee; Hyekyung Kim; Jiwoo Oh; Younseon Wang; Woo-Hee Kim
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