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W
Woo‐Hee Kim
tds innovation inc
33
H指数
119
论文数
3.1K
被引数
0
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77
发表时间
发表时间
IF
被引数
Thermal atomic layer etching of SnO
2
thin films using a chlorination and ligand-addition mechanism
采用氯化和配体添加机制的热原子层刻蚀SnO
2
薄膜
Applied Surface Science
IF
6.9
2026-10-08
0
PRE
AI
Jeongbin Lee; Woo-Hee Kim
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Spatially deterministic nucleation of 2D semiconductors by etching flux
通过蚀刻流的空间确定性成核制备二维半导体
Nature
IF
48.5
2026-10-07
0
OA
AI
Jeongwon Park; Jiyun Kim; Sumin Kang; Jieun Oh; Youngmin Sunwoo; Saeyoung Oh; Seunghye Shin; Sera Yang; Seonghwan Jo; Jaehyun Lee; Donghyeop Lee; Minsu Kim; Changhun Eom; Seohyun Jeong; Chan Lim; Gunho Moon; Mingu Kang; Min-gyu Kim; Junhyeok Kim; Chaejeong Yun; Gichang Noh; Donggeon Park; Dongyoung Kim; Seongdae Kwon; Chengyun Hong; Hyeongjin Lim; Minseok Choi; Yongjoon Lee; Joonghoon Choi; Junhyuk Tak; Guanning Shao; Seung Jae Kwak; Tae Soo Kim; Jeehwan Kim; YongJoo Kim; Young Joon Hong; Sung-Yool Choi; Heejun Yang; Jonghwan Kim; Byungjo Kim; Woo-Hee Kim; Chang-Soo Lee; Kibum Kang
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Recovering dielectric integrity in atomic layer etched ZrO2 MIM capacitors via post-etch annealing
通过后刻蚀退火恢复原子层刻蚀ZrO2 MIM电容器的介电完整性
Applied Surface Science
IF
6.9
2026-09-30
0
PRE
AI
Lee, Jeongbin; Oh, Jiwoo; Kwon, Yongju; Kim, Jung-Tae; Kim, Ji Hwan; Lee, Seung Won; Park, Tae Joo; Ahn, Ji-Hoon; Kim, Woo-Hee
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Atomic layer deposition of thermally stable conductive MoO
x
films using a low-valent precursor for ZrO
2
-based capacitors
使用低价态前驱体通过原子层沉积法制备用于ZrO
2
基电容器的热稳定导电MoO
x
薄膜
Applied Surface Science
IF
6.9
2026-09-24
0
PRE
AI
Yongju Kwon; Jungtae Kim; Woohyuk Kim; Donghun Shin; Yongjoo Park; Woo-Hee Kim
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High-Performance Top-Gate SnO
2
Transistors Enabled by Defect Modulation and Interface Engineering Using Atomic Layer Deposition
通过原子层沉积调控缺陷和界面工程实现高性能顶栅SnO
2
晶体管
Advanced Materials Technologies
IF
6.2
2026-09-11
0
PRE
AI
Jung-Tae Kim; Ji Hyeon Choi; Jiyeong Yang; Jeongbin Lee; Jiwoo Oh; Ji-Hoon Ahn; Tae Joo Park; Woo-Hee Kim
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Interfacial stabilization of ZrO
2
/Mo
2
N capacitors via ultrathin Nb
2
O
5
insertion for scaled DRAM applications
通过插入超薄Nb
2
O
5
层稳定ZrO
2
/Mo
2
N电容器界面,用于缩放型DRAM应用
Surfaces and Interfaces
IF
6.3
2026-09-03
0
PRE
AI
Yeon-Ji Jeon; Yoonchul Shin; Ji Hwan Kim; Chan-Bin Hong; Seo-Young Choi; Woo-Hee Kim; Tae Joo Park; Ji-Hoon Ahn
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Enhancing oxide/nitride selectivity in area-selective atomic layer deposition via pyridine-catalyzed inhibition
通过吡啶催化的抑制来增强区域选择性原子层沉积中的氧化物/氮化物选择性
Surfaces and Interfaces
IF
6.3
2026-08-15
0
PRE
AI
Oh, Jieun; Kim, Woohyuk; Lim, Hyeonggeun; Lee, Soyoung; Kim, Woo-Hee
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Catalyzed selective atomic layer deposition of SiO2 on amorphous carbon via silicon blocking by alkyltrichlorosilane self-assembled monolayers
通过烷基三氯硅烷自组装单分子层硅封堵催化选择性原子层沉积SiO2于非晶碳上
Applied Surface Science
IF
6.9
2026-04-17
0
PRE
AI
Seo-Hyun Lee; Chang Mo Yoon; Jeong-Min Lee; Woo-Hee Kim
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Atomic-layer-deposited Ru–RuOx mixed protective layer for improving ionic–electronic conductivity of sintered LiCoO2 cathodes in Li-ion batteries
原子层沉积的Ru–RuOx混合保护层用于提高烧结LiCoO2正极在锂离子电池中的离子-电子导电性
j. mater. chem. a
IF
0
2026-04-16
0
OA
AI
Kyu Moon Kwon; Ji Won Han; Joungwon Park; Kyoung Hwan Kim; Hwi-Yeol Park; Woo-Hee Kim; Ji-Hoon Ahn; Hyo Rang Kang; Tae Joo Park
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Thermal atomic layer etching of copper via sequential chlorination and volatility-controlled hydration
通过顺序氯化与挥发性控制水合作用实现铜的热原子层刻蚀
Materials Horizons
IF
10.7
2026-04-01
0
PRE
AI
Lee, Jeongbin; Lee, Dongjun; Oh, Jiwoo; Kim, Jung-Tae; Oh, Jieun; Yoon, Chang Mo; Kim, Woo-Hee
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Atomic layer deposition of hafnium silicate thin films using a single source precursor
采用单一前驱体的硅酸铪薄膜原子层沉积
Applied Surface Science
IF
6.9
2026-03-24
0
PRE
AI
Jieun Oh; Seo-Hyun Lee; Jeongbin Lee; Chang Mo Yoon; Daeyeong Kim; Yongjoo Park; Woo-Hee Kim
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Composition-controlled hafnium-based inorganic/organic hybrid dry photoresist via discrete feeding-molecular layer deposition
通过离散式喂料-分子层沉积法制备的组分可控的铪基无机/有机杂化干膜光刻胶
Applied Surface Science
IF
6.9
2026-03-14
0
PRE
AI
Kyungryul Ha; Dong Geun Kim; Hyekyung Kim; Ji-Hoon Ahn; Woo-Hee Kim; Tae Joo Park
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Oxidation Dynamics and Surface Chemistry of Iridium and Iridium Oxide Films Grown by Atomic Layer Deposition Using O2 and O3
采用原子层沉积法制备的铱和铱氧化物薄膜的氧化动力学与表面化学性质(使用O2和O3)
Small
IF
12.1
2025-10-14
0
OA
AI
Ji Won Han; Jae Woo Jang; Ryosuke Harada; Woo-Hee Kim; Ji-Hoon Ahn; Tae Joo Park
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Atomic layer etching of high-k oxide thin films using hexafluoroacetylacetone and oxygen radicals
使用六氟乙酰丙酮和氧自由基对高k氧化物薄膜进行原子层刻蚀
CHEMICAL ENGINEERING JOURNAL
IF
13.2
2025-06-01
0
PRE
AI
Lee, Jeongbin; Oh, Jieun; Kim, Jung-Tae; Oh, Jiwoo; Lee, Jeong-Min; Kim, Woo-Hee
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Selective metal passivation by vapor-dosed phosphonic acid inhibitors for area-selective atomic layer deposition of SiO2 thin films
通过气相剂量的膦酸抑制剂进行选择性金属钝化,用于SiO2薄膜的区域选择性原子层沉积
Nano Convergence
IF
11
2025-05-30
0
OA
AI
Jeong-Min Lee; Seo-Hyun Lee; Ji Hun Lee; Junghun Kwak; Jinhee Lee; Woo-Hee Kim
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Molecular layer deposition of tin-based organic-inorganic hybrid films as photoresists
作为光致抗蚀剂的锡基有机-无机杂化薄膜的分子层沉积
APPLIED SURFACE SCIENCE
IF
6.9
2025-04-01
0
PRE
AI
Kim, Dong Geun; Ha, Kyungryul; Kim, Hyekyung; Kim, Woo-Hee; Park, Tae Joo; Ahn, Ji-Hoon
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Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching
采用协同原子层沉积与刻蚀技术制备超薄钌薄膜
SMALL METHODS
IF
9.1
2025-03-21
1
PRE
AI
Jeongbin Lee; Jung-Tae Kim; Jieun Oh; Dongjun Lee; Seo-Hyun Lee; Hyekyung Kim; Jiwoo Oh; Younseon Wang; Woo-Hee Kim
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Area-selective deposition of mos2 using self-assembled monolayers for high-precision patterning
利用自组装单分子层进行MoS2的区域选择性沉积以实现高精度图案化
MATERIALS LETTERS
IF
2.7
2025-03-01
0
PRE
AI
Choi, Jeong-Hun; Kim, Dong Geun; Lee, Seo-Hyun; Choi, Kang; Kim, Woo-Hee; Yoon, Chang Mo; Ahn, Ji-Hoon
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High-temperature atomic layer deposition of HfO2 film with low impurity using a novel Hf precursor
JOURNAL OF MATERIALS CHEMISTRY C
IF
5.1
2025-01-01
0
PRE
AI
Park, Jae Chan; Choi, Chang Ik; Jeon, Woong Pyo; Van, Tran Thi Ngoc; Kim, Woo-Hee; Ahn, Ji-Hoon; Shong, Bonggeun; Park, Tae Joo
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Enhanced Deposition Selectivity of High-k Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors
ACS APPLIED MATERIALS & INTERFACES
IF
8.2
2024-07-01
0
PRE
AI
Lee, Jeong-Min; Lee, Seo-Hyun; Lee, Ji Hun; Kwak, Junghun; Lee, Jinhee; Kim, Woo-Hee
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研究方向
暂时未获取到该数据
合作学者
合作期刊
J
Jong‐Hyun Ahn
H 指数: 90 · 论文数: 396
S
Stacey F. Bent
H 指数: 81 · 论文数: 431
W
W. M. M. Kessels
H 指数: 81 · 论文数: 617
D
David Thompson
H 指数: 79 · 论文数: 1.1K
Z
Zonghoon Lee
H 指数: 66 · 论文数: 307
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