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Woo‐Hee Kim

tds innovation inc

33H指数
119论文数
3.1K被引数
收录论文 77
发表时间
Spatially deterministic nucleation of 2D semiconductors by etching flux通过蚀刻流的空间确定性成核制备二维半导体
errNature
IF48.5
err2026-10-07
err0
errOAAI
errJeongwon Park; Jiyun Kim; Sumin Kang; Jieun Oh; Youngmin Sunwoo; Saeyoung Oh; Seunghye Shin; Sera Yang; Seonghwan Jo; Jaehyun Lee; Donghyeop Lee; Minsu Kim; Changhun Eom; Seohyun Jeong; Chan Lim; Gunho Moon; Mingu Kang; Min-gyu Kim; Junhyeok Kim; Chaejeong Yun; Gichang Noh; Donggeon Park; Dongyoung Kim; Seongdae Kwon; Chengyun Hong; Hyeongjin Lim; Minseok Choi; Yongjoon Lee; Joonghoon Choi; Junhyuk Tak; Guanning Shao; Seung Jae Kwak; Tae Soo Kim; Jeehwan Kim; YongJoo Kim; Young Joon Hong; Sung-Yool Choi; Heejun Yang; Jonghwan Kim; Byungjo Kim; Woo-Hee Kim; Chang-Soo Lee; Kibum Kang
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Recovering dielectric integrity in atomic layer etched ZrO2 MIM capacitors via post-etch annealing通过后刻蚀退火恢复原子层刻蚀ZrO2 MIM电容器的介电完整性
err2026-09-30
err0
PREAI
errLee, Jeongbin; Oh, Jiwoo; Kwon, Yongju; Kim, Jung-Tae; Kim, Ji Hwan; Lee, Seung Won; Park, Tae Joo; Ahn, Ji-Hoon; Kim, Woo-Hee
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Atomic layer deposition of hafnium silicate thin films using a single source precursor采用单一前驱体的硅酸铪薄膜原子层沉积
err2026-03-24
err0
PREAI
errJieun Oh; Seo-Hyun Lee; Jeongbin Lee; Chang Mo Yoon; Daeyeong Kim; Yongjoo Park; Woo-Hee Kim
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Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching采用协同原子层沉积与刻蚀技术制备超薄钌薄膜
err2025-03-21
err1
PREAI
errJeongbin Lee; Jung-Tae Kim; Jieun Oh; Dongjun Lee; Seo-Hyun Lee; Hyekyung Kim; Jiwoo Oh; Younseon Wang; Woo-Hee Kim
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High-temperature atomic layer deposition of HfO2 film with low impurity using a novel Hf precursor
err2025-01-01
err0
PREAI
errPark, Jae Chan; Choi, Chang Ik; Jeon, Woong Pyo; Van, Tran Thi Ngoc; Kim, Woo-Hee; Ahn, Ji-Hoon; Shong, Bonggeun; Park, Tae Joo
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Enhanced Deposition Selectivity of High-k Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors
err2024-07-01
err0
PREAI
errLee, Jeong-Min; Lee, Seo-Hyun; Lee, Ji Hun; Kwak, Junghun; Lee, Jinhee; Kim, Woo-Hee
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