The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactionsPLASMA SOURCES SCIENCE & TECHNOLOGYIF3.32022-12-0919OA
Photonic metacrystal: design methodology and experimental characterizationOPTICS EXPRESSIF3.32022-02-224OA
Advances in Interfacing Optical Fibers to Nanophotonic Waveguides Via Mechanically Compliant Polymer Waveguides通过机械顺从的聚合物波导将光纤与纳米光子波导接口的进展IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICSIF5.12020-03-0115PREAI
Integrated Metamaterial Interfaces for Self-Aligned Fiber-to-Chip Coupling in Volume ManufacturingIEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICSIF5.12019-05-0151PREAI
Experimental realization of deep-subwavelength confinement in dielectric optical resonatorsSCIENCE ADVANCESIF12.52018-08-03132OAAI
Highly selective dry etching of polystyrene-poly(methyl methacrylate) block copolymer by gas pulsing carbon monoxide-based plasmasJOURNAL OF PHYSICS D-APPLIED PHYSICSIF3.22017-04-219PREAI
A Novel Approach to Photonic Packaging Leveraging Existing High-Throughput Microelectronic FacilitiesIEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICSIF5.12016-11-0191PREAI
Characterizing fluorocarbon assisted atomic layer etching of Si using cyclic Ar/C4F8 and Ar/CHF3 plasmaJOURNAL OF CHEMICAL PHYSICSIF3.12016-09-0845OAAI
Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-b-PMMA Block Copolymers for Advanced FinFET Device and Circuit FabricationACS NANOIF162014-04-11176PREAI
Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectricJOURNAL OF PHYSICS D-APPLIED PHYSICSIF3.22013-06-1115PREAI
Characterization and mechanism of He plasma pretreatment of nanoscale polymer masks for improved pattern transfer fidelityAPPLIED PHYSICS LETTERSIF3.62011-12-2710PREAI
Synergistic effects of vacuum ultraviolet radiation, ion bombardment, and heating in 193 nm photoresist roughening and degradationAPPLIED PHYSICS LETTERSIF3.62008-04-1675PREAI
Near-surface modification of polystyrene by Ar+:: Molecular dynamics simulations and experimental validationAPPLIED PHYSICS LETTERSIF3.62007-12-0660PREAI
个人简介
教育背景
工作经历
荣誉奖项
未登录.png){kind=icon}
未登录个人简介教育背景工作经历荣誉奖项
研究方向