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收藏Visible upconversion luminescence of doped bulk silicon for a multimodal wafer metrology
Afinogenov, Boris, I; Sofronov, Anton N.; Antropov, Ilya M.; Filatov, Nikita R.; Medvedev, Anton S.; Shorokhov, Alexander S.; Mantsevich, Vladimir N.; Maslova, Natalia S.; Kim, Taehyun; Jeang, Eunhee; Kim, Ingi; Seo, Minhwan; Han, Kyunghun; Bae, Sangwoo; Joo, Wondon; Yoo, Hosun; Bessonov, Vladimir O.; Fedyanin, Andrey A.; Ryabko, Maksim, V; Polonsky, Stanislav, V
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