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М

М.В. Шибалов

Russian Academy of Sciences

H指数:6

被引数:99

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Low-confinement silicon nitride waveguides manufactured via direct glass bonding

通过直接玻璃键合制造的低约束度氮化硅波导

Optical Materials

IF4.2

2026-08-170

PRE

Silicon nitride on-chip C-band spontaneous emission generation based on lanthanide doped microparticles

optics & laser technology

IF0

2026-01-300

PRE

Optical polymer aligner fabricated by 2pp for connecting angled fiber to an optical chip

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

IF2.1

2025-10-310

PRE

Ultrafast NbN superconducting single-photon detector integrated in a parabolic mirror

超快NbN超导单光子探测器集成在抛物面镜中

Superconductor Science and Technology

IF4.2

2025-10-100

PRE

Void-free upper cladding deposition process for low-loss integrated silicon nitride photonics

PHYSICAL REVIEW APPLIED

IF4.4

2024-11-120

PRE

Technology of fabrication superconducting free-standing structures (FSS)

SUPERCONDUCTOR SCIENCE & TECHNOLOGY

IF4.2

2024-11-010

OA

A novel extended gate ISFET design for biosensing application compatible with standard CMOS

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

IF4.6

2024-07-015

PRE

Superconducting single-photon detector integrated in DBR with optical microconnector for MM or SM fiber

SUPERCONDUCTOR SCIENCE & TECHNOLOGY

IF4.2

2024-06-100

OA

Planar technology fabrication of high-density luminescence structure based on NaYF 4 microparticles

OPTICAL MATERIALS

IF4.2

2024-04-010

PRE

Superconducting TSV contact for cryoelectronic devices

SUPERCONDUCTOR SCIENCE & TECHNOLOGY

IF4.2

2023-12-191

OA

Ultrathin epitaxial NbNx film deposited by PEALD method on C-plane sapphire: Growth, structure and superconducting properties

APPLIED SURFACE SCIENCE

IF6.9

2023-03-011

PRE

Investigation of the superconducting properties of NbN films deposited by DC magnetron sputtering on a high-k dielectric HfO2 buffer layer

直流磁控溅射在高k介电HfO2缓冲层上沉积的NbN薄膜的超导性能研究

SUPERCONDUCTOR SCIENCE & TECHNOLOGY

IF4.2

2021-10-089

OA

Fabrication and characterization of quasi-three-dimensional capacitor structure based on carbon nanowalls

IF11.6

2021-10-017

PREAI

Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate

SUPERCONDUCTOR SCIENCE & TECHNOLOGY

IF4.2

2021-07-028

PRE

Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure

JOURNAL OF ALLOYS AND COMPOUNDS

IF6.3

2021-03-014

PREAI