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Xiaojing Su

kaili university

6H指数
85论文数
189被引数
收录论文 9
发表时间
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Probability distribution-based method for aberration budgeting in EUV lithography
err2024-11-21
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errOAAI
errWang, Jiashuo; Su, Xiaojing; Su, Yajuan; Wei, Yayi
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Advanced process and electron device technology
err2022-06-01
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errOAAI
errZhang, Dan; Su, Xiaojing; Chang, Hao; Xu, Hao; Wang, Xiaolei; He, Xiaobin; Li, Junjie; Zhao, Fei; Yao, Qide; Luo, Yanna; Ma, Xueli; Yang, Hong; Li, Yongliang; Wu, Zhenhua; Su, Yajuan; Yang, Tao; Wei, Yayi; Du, Anyan; Zhu, Huilong; Li, Junfeng; Yin, Huaxiang; Luo, Jun; Ye, Tianchun; Wang, Wenwu
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An Improved Dimensional Measurement Method of Staircase Patterns With Higher Precision in 3D NAND
err2020-01-01
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errOAAI
errHong, Peizhen; Zhao, Zhiguo; Luo, Jun; Xia, Zhiliang; Su, Xiaojing; Zhang, Libin; Li, Chunlong; Huo, Zongliang
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Mitigating the influence of wafer topography on the implantation process in optical lithography
err2017-07-24
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PREAI
errDong, Lisong; Chen, Wenhui; Fan, Taian; Su, Xiaojing; Wei, Yayi; Ye, Tianchun
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