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M

Mikko Utriainen

tampere university

H指数:21

被引数:1,106

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Lanthanum doped hafnium oxide thin films deposited on a lateral high aspect ratio structure using atomic layer deposition: A comparative study of surface composition and uniformity using x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry

APPLIED SURFACE SCIENCE

IF6.9

2025-01-010

OAAI

Excellent conformality of atmospheric-pressure plasma-enhanced spatial atomic layer deposition with subsecond plasma exposure times

APPLIED PHYSICS LETTERS

IF3.6

2023-10-315

OA

Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3 and HfO2 (vol 123, pg 27030, 2019)

JOURNAL OF PHYSICAL CHEMISTRY C

IF3.2

2019-12-190

OAAI

Deposition of tin oxide into porous silicon by atomic layer epitaxy

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

IF3.3

2019-12-0772

PREAI

Controlled electrical conductivity in SnO2 thin films by oxygen or hydrocarbon assisted atomic layer epitaxy

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

IF3.3

2019-12-0663

PREAI

Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2

在SiO2，TiO2，Al2O3和HfO2的等离子体辅助原子层沉积过程中，薄膜的保形性和O原子的提取重组概率

JOURNAL OF PHYSICAL CHEMISTRY C

IF3.2

2019-10-1639

OAAI

ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition

通过原子层沉积和化学气相沉积在高纵横比结构中沉积的薄膜的ToF-SIMS 3D分析

IF4.3

2019-07-1926

OAAI

Luminescent bacteria-based sensing method for methylmercury specific determination

ANALYTICAL AND BIOANALYTICAL CHEMISTRY

IF3.8

2011-04-0427

PREAI

Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors

SENSORS AND ACTUATORS B-CHEMICAL

IF7.7

2010-06-0129

PREAI

Determination of gas phase triacetone triperoxide with aspiration ion mobility spectrometry and gas chromatography-mass spectrometry

ANALYTICA CHIMICA ACTA

IF6

2008-08-0173

PREAI

Bias dependent sensitivity in metal-oxide gas sensors

SENSORS AND ACTUATORS B-CHEMICAL

IF7.7

2008-04-0140

PREAI

Combining miniaturized ion mobility spectrometer and metal oxide gas sensor for the fast detection of toxic chemical vapors

SENSORS AND ACTUATORS B-CHEMICAL

IF7.7

2003-08-01110

PREAI

SnO2 sol-gel derived thin films for integrated gas sensors

SENSORS AND ACTUATORS B-CHEMICAL

IF7.7

2001-06-0142

PREAI

Studies of metallic thin film growth in an atomic layer epitaxy reactor using M(acac)2 (M = Ni, Cu, Pt) precursors

APPLIED SURFACE SCIENCE

IF6.9

2000-04-01214

PREAI

Chemical imaging of patterned inorganic thin-film structures by lateral force microscopy

ANALYTICAL CHEMISTRY

IF6.7

1999-05-119

PREAI

Effects of intermediate zinc pulses on properties of TiN and NbN films deposited by atomic layer epitaxy

APPLIED SURFACE SCIENCE

IF6.9

1997-12-01147

PREAI