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Elastic modulus and coefficient of thermal expansion of piezoelectric Al1-xScxN (up to x=0.41) thin filmsAPL MATERIALSIF4.52018-07-0199OAAI
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Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layersAPPLIED PHYSICS LETTERSIF3.62016-04-2811PREAI
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