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The 2012 Plasma Roadmap

delete2012-06-07
delete570
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OA
AI
S
Seiji Samukawa *
M
Masaru Hori
S
Shahid Rauf
K
Kunihide Tachibana
P
Peter Bruggeman
G
G. M. W. Kroesen
J
J. Christopher Whitehead
A
Anthony B. Murphy
A
Alexànder Gutsol
S
Svetlana Starikovskaia
U
Uwe Kortshagen
J
Jean-Pierre Bœuf
T
Timothy J. Sommerer
M
Mark J. Kushner
U
Uwe Czarnetzki
N
N. J. Mason
DOI:10.1088/0022-3727/45/25/253001delete
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摘要

摘要

En 中文
Low-temperature plasma physics and technology are diverse and interdisciplinary fields. The plasma parameters can span many orders of magnitude and applications are found in quite different areas of daily life and industrial production. As a consequence, the trends in research, science and technology are difficult to follow and it is not easy to identify the major challenges of the field and their many sub-fields. Even for experts the road to the future is sometimes lost in the mist. Journal of Physics D: Applied Physics is addressing this need for clarity and thus providing guidance to the field by this special Review article, The 2012 Plasma Roadmap. Although roadmaps are common in the microelectronic industry and other fields of research and development, constructing a roadmap for the field of low-temperature plasmas is perhaps a unique undertaking. Realizing the difficulty of this task for any individual, the plasma section of the Journal of Physics D Board decided to meet the challenge of developing a roadmap through an unusual and novel concept. The roadmap was divided into 16 formalized short subsections each addressing a particular key topic. For each topic a renowned expert in the sub-field was invited to express his/her individual visions on the status, current and future challenges, and to identify advances in science and technology required to meet these challenges. Together these contributions form a detailed snapshot of the current state of the art which clearly shows the lifelines of the field and the challenges ahead. Novel technologies, fresh ideas and concepts, and new applications discussed by our authors demonstrate that the road to the future is wide and far reaching. We hope that this special plasma science and technology roadmap will provide guidance for colleagues, funding agencies and government institutions. If successful in doing so, the roadmap will be periodically updated to continue to help in guiding the field.
Keyword:
INDUCTIVELY-COUPLED PLASMA
LARGE-AREA
LOW-PRESSURE
HYDROGEN-PRODUCTION
NONTHERMAL PLASMA
DISCHARGE
TEMPERATURE
REDUCTION
DAMAGE
OXIDATION
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期刊

Journal of Physics D-Applied Physics 封面图
Journal of Physics D-Applied Physics
IF:
3.2
论文数:
2.6W
被引数:
4.9W

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C
chevron
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674
论文数: 569
被引数: 2
T
tohoku university
学者数:
4.3W
论文数: 3.6W
被引数: 31
K
Kyoto University
学者数:
5.1W
论文数: 4.6W
被引数: 6.1W
A
applied materials inc
学者数:
241
论文数: 151
被引数: 0
U
universite toulouse iii - paul sabatier
学者数:
1.8W
论文数: 1.3W
被引数: 23
N
Nagoya University
学者数:
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论文数: 2.5W
被引数: 2.6W
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University of Minnesota Twin Cities
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论文数: 3.1W
被引数: 58
U
universite de toulouse
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Ecole Polytechnique
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Universite Paris Saclay
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institut polytechnique de paris
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Eindhoven University of Technology
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论文数: 1.5W
被引数: 2.2W
U
University of Manchester
学者数:
5.7W
论文数: 5.3W
被引数: 7.4W
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