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SaveHighly scaled CGeSbTe phase change material spacer for high-density phase change memory integration on 300mm wafer
Wan, Ziqi; Wang, Ruobing; Fang, Wencheng; Zheng, Jia; Chen, Yuqing; Zou, Xixi; Wang, Ruoqin; Sui, Yanping; Zhu, Yulai; Yan, Bangcheng; Zhong, Min; Feng, Gaoming; Song, Zhitang; Zhou, Xilin
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