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SaveUnderstanding the mechanism of plasma etching of carbon-doped GeSbTe phase change material
Liu, Jin; Zhang, Jiarui; Wan, Ziqi; Chen, Yuqing; Zheng, Jia; Zou, Xixi; Song, Sannian; Qiao, Shan; Wang, Ruobing; Song, Zhitang; Zhou, Xilin
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