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SaveShare Save Share Save Share Save Share Save Share Save Share Save A piezoelectric MEMS microphone with proof mass and its array
Lu, Liangyu; Liu, Wenjuan; Hu, Bohao; Yang, Chaoxiang; Wang, Zekai; Liu, Yan; Cai, Yao; Wang, Jian; Guo, Shishang; Sun, Chengliang Share Save Analysis of Heterostructure Formation of Abnormally Oriented Grains in Sputter-Deposited AlScN Films and Its Impact on Bulk Acoustic Wave DevicesGu, Xiyu; Liu, Yan; Huang, Xiaoming; Ding, Jiaqi; Qu, Yuanhang; Liu, Zesheng; Cai, Yao; Liu, Wenjuan; Guo, Shishang; Sun, Chengliang Share Save 6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodesTong, Xin; Zou, Yang; Wen, Zhiwei; Liu, Zesheng; Luo, Tiancheng; Zhou, Jie; Liu, Huajun; Ren, Yuqi; Xu, Qinwen; Liu, Wenjuan; Liu, Yan; Cai, Yao; Sun, Chengliang Share Save Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonatorsGu, Xiyu; Liu, Yan; Qu, Yuanhang; Wei, Min; Chen, Xiang; Wang, Yaxin; Liu, Wenjuan; Pi, Bensong; Soon, Bo Woon; Cai, Yao; Guo, Shishang; Sun, Chengliang Share Save Share Save MEMS Oscillators-Network-Based Ising Machine with Grouping MethodDeng, Yi; Zhang, Yi; Zhang, Xinyuan; Jiang, Yang; Chen, Xi; Yang, Yansong; Tong, Xin; Cai, Yao; Liu, Wenjuan; Sun, Chengliang; Shang, Dashan; Wang, Qing; Yu, Hongyu; Wang, Zhongrui Share Save High figure-of-merit A1-mode lamb wave resonators operating around 6 GHz based on the LiNbO3 thin filmTong, Xin; Liu, Wenjuan; Wen, Zhiwei; Liu, Zesheng; Xu, Qinwen; Zou, Yang; Gao, Chao; Zhou, Jie; Liu, Yan; Cai, Yao; Sun, Chengliang Share Save Advanced technologies of FBAR for tuning effective electromechanical coupling coefficientQu, Yuanhang; Liu, Yan; Gu, Xiyu; Wei, Min; Chen, Xiang; Huang, Xiaoming; Liu, Zesheng; Ding, Jiaqi; Wen, Zhiwei; Cai, Yao; Liu, Wenjuan; Guo, Shishang; Sun, Chengliang Share Save A laterally excited bulk acoustic resonator with scattering vias in electrodesWen, Zhiwei; Liu, Wenjuan; Luo, Tiancheng; Tong, Xin; Xie, Ying; Gu, Xiyu; Liu, Yan; Cai, Yao; Guo, Shishang; Wang, Jian; Sun, Chengliang Share Save Share Save Share Save Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applicationsZou, Yang; Gao, Chao; Zhou, Jie; Liu, Yan; Xu, Qinwen; Qu, Yuanhang; Liu, WenJuan; Soon, Jeffrey Bo Woon; Cai, Yao; Sun, Chengliang Share Save Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2Nian, Laixia; Zou, Yang; Gao, Chao; Zhou, Yu; Fan, Yuchen; Wang, Jian; Liu, Wenjuan; Liu, Yan; Soon, Jeffrey Bowoon; Cai, Yao; Sun, Chengliang Share Save 
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