Kazunori Shinoda - Publications, H-index & Citations

Kazunori Shinoda

nagoya university

20H指数

153论文数

1.4K被引数

收录论文 17

发表时间

Thermal-cyclic etching of SiGe with selective removal over Ge using fluorocarbon-based plasma and infrared heating 使用氟碳基等离子体和红外加热对SiGe进行热循环刻蚀，并选择性去除Ge

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

IF2.1

2026-03-01

PREAI

Shinoda, Kazunori; Nguyen, Thi-Thuy-Nga; Yokogawa, Kenetsu; Izawa, Masaru; Ishikawa, Kenji; Hori, Masaru

Selective dry etching of TiAlC over TiN using nonhalogen N2/H2 plasma 使用无卤素N2/H2等离子体对TiN上的TiAlC进行选择性干法蚀刻

APPLIED SURFACE SCIENCE

IF6.9

2025-05-01

OAAI

Nguyen, Thi-Thuy-Nga; Shinoda, Kazunori; Hsiao, Shih-Nan; Maeda, Kenji; Yokogawa, Kenetsu; Izawa, Masaru; Ishikawa, Kenji; Hori, Masaru

Nonhalogen Dry Etching of Metal Carbide TiAlC by Low-Pressure N2/H2 Plasma at Room Temperature

ACS APPLIED MATERIALS & INTERFACES

IF8.2

2024-09-22

OAAI

Nguyen, Thi-Thuy-Nga; Shinoda, Kazunori; Hsiao, Shih-Nan; Maeda, Kenji; Yokogawa, Kenetsu; Izawa, Masaru; Ishikawa, Kenji; Hori, Masaru

Dry etching of ternary metal carbide TiAlC via surface modification using floating wire-assisted vapor plasma

SCIENTIFIC REPORTS

IF3.9

2022-11-27

OAAI

Nguyen, Thi-Thuy-Nga; Shinoda, Kazunori; Hamamura, Hirotaka; Maeda, Kenji; Yokogawa, Kenetsu; Izawa, Masaru; Ishikawa, Kenji; Hori, Masaru

Thermal-cyclic atomic layer etching of cobalt with smooth etched surface by plasma oxidation and organometallization

APPLIED PHYSICS LETTERS

IF3.6

2022-09-19

PREAI

Fujisaki, Sumiko; Yamaguchi, Yoshihide; Kobayashi, Hiroyuki; Shinoda, Kazunori; Yamada, Masaki; Hamamura, Hirotaka; Kawamura, Kohei; Izawa, Masaru

Rapid thermal-cyclic atomic-layer etching of titanium nitride in CHF3/O2 downstream plasma CHF3/O2下游等离子体中氮化钛的快速热循环原子层蚀刻

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2019-09-09

PREAI

Shinoda, Kazunori; Miyoshi, Nobuya; Kobayashi, Hiroyuki; Izawa, Masaru; Ishikawa, Kenji; Hori, Masaru

Selective atomic-level etching using two heating procedures, infrared irradiation and ion bombardment, for next-generation semiconductor device manufacturing

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2017-04-13

PREAI

Shinoda, K.; Miyoshi, N.; Kobayashi, H.; Miura, M.; Kurihara, M.; Maeda, K.; Negishi, N.; Sonoda, Y.; Tanaka, M.; Yasui, N.; Izawa, M.; Ishii, Y.; Okuma, K.; Saldana, T.; Manos, J.; Ishikawa, K.; Hori, M.

100-Gbps CMOS transceiver for multilane optical backplane system with a 1.3 cm2 footprint

OPTICS EXPRESS

IF3.3

2011-12-06

OAAI

Takemoto, Takashi; Yuki, Fumio; Yamashita, Hiroki; Tsuji, Shinji; Lee, Yong; Adachi, Koichiro; Shinoda, Kazunori; Matsuoka, Yasunobu; Kogo, Kenji; Nishimura, Shinji; Nido, Masaaki; Namiwaka, Masahiko; Kaneko, Taro; Sugimoto, Takara; Kurata, Kazuhiko

25-Gb/s Multichannel 1.3-μ Surface-Emitting Lens-Integrated DFB Laser Arrays

JOURNAL OF LIGHTWAVE TECHNOLOGY

IF4.8

2011-10-01

PREAI

Adachi, Koichiro; Shinoda, Kazunori; Kitatani, Takeshi; Fukamachi, Toshihiko; Matsuoka, Yasunobu; Sugawara, Toshiki; Tsuji, Shinji

Wide Temperature Range Operation of 25-Gb/s 1.3-μm InGaAlAs Directly Modulated Lasers

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

IF5.1

2011-09-01

PREAI

Fukamachi, Toshihiko; Adachi, Koichiro; Shinoda, Kazunori; Kitatani, Takeshi; Tanaka, Shigehisa; Aoki, Masahiro; Tsuji, Shinji

Components and Interconnection Technologies for Photonic-Assisted Routers Toward Green Networks

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

IF5.1

2011-03-01

PREAI

Nishimura, Shinji; Shinoda, Kazunori; Lee, Yong; Ono, Goichi; Fukuda, Koji; Yuki, Fumio; Takemoto, Takashi; Toyoda, Hidehiro; Yamada, Masaki; Tsuji, Shinji; Ikeda, Naoya

Wavelength-tunable short-cavity DBR laser array with active distributed Bragg reflector 具有有源分布式布拉格反射器的波长可调谐短腔DBR激光器阵列

JOURNAL OF LIGHTWAVE TECHNOLOGY

IF4.8

2006-11-01

PREAI

Arimoto, Hideo; Kitatani, Takeshi; Tsuchiya, Tomonobu; Shinoda, Kazunori; Takei, Aki; Uchiyama, Hiroyuki; Aoki, Masahiro; Tsuji, Shinji

Beam-shaping technique for improving the beam quality of a high-power laser-diode stack

OPTICS LETTERS

IF3.3

2006-06-01

PREAI

Gao, X; Ohashi, H; Okamoto, H; Takasaka, M; Shinoda, K