D. V. Lopaev - Publications, H-index & Citations

D. V. Lopaev

Skobeltsyn Institute of Nuclear Physics

27H指数

186论文数

2.4K被引数

收录论文 53

发表时间

Si and SiO2 sputtering by low-energy Ne+ ions in plasma conditions 在等离子体条件下，利用低能Ne+离子溅射Si和SiO2

Vacuum

IF3.9

2025-07-08

PREAI

D.R. Shibanov; D.V. Lopaev; K.I. Maslakov; M.R. Konnikova; M.A. Bogdanova; A.T. Rakhimov

VUV radiation impact on O(3P) atom surface loss on Pyrex in DC discharge in mixtures of O2 with Ar, Kr and Xe

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2025-03-01

PREAI

Ziganshin, I. I.; Galiullin, K. R.; Lopaev, D., V; Kirillov, E. A.; Rakhimov, A. T.

SiO2 sputtering by low-energy Ar+, Kr+, and Xe+ ions in plasma conditions

VACUUM

IF3.9

2025-01-01

PREAI

Shibanov, D. R.; Lopaev, D. V.; Maslakov, K. I.; Konnikova, M. R.; Rakhimov, A. T.

H- production in hydrogen DC glow discharge

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2024-08-05

PREAI

Lopaev, D., V; Mankelevich, Yu A.; Kropotkin, A. N.; Voloshin, D. G.; Rakhimova, T., V

Oxygen atom and ozone kinetics in the afterglow of a pulse-modulated DC discharge in pure O2: an experimental and modelling study of surface mechanisms and ozone vibrational kinetics

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2023-09-25

OAAI

Booth, J-P; Guaitella, O.; Zhang, S.; Lopaev, D.; Zyryanov, S.; Rakhimova, T.; Voloshin, D.; Chukalovsky, A.; Volynets, A.; Mankelevich, Yu

Plasma density determination from ion current to cylindrical Langmuir probe with validation on hairpin probe measurements

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2023-04-11

PREAI

Voloshin, D.; Rakhimova, T.; Kropotkin, A.; Amirov, I; Izyumov, M.; Lopaev, D.; Zotovich, A.; Ziryanov, S.

Effect of an electron beam on a dual-frequency capacitive rf plasma: experiment and simulation *

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2022-08-30

PREAI

Bogdanova, M.; Lopaev, D.; Zotovich, A.; Proshina, O.; Rakhimova, T.; Zyryanov, S.; Rakhimov, A.

Quenching of O2(b1σg + ) by O(3P) atoms. Effect of gas temperature

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2022-06-30

OAAI

Booth, J. P.; Chatterjee, A.; Guaitella, O.; Lopaev, D.; Zyryanov, S.; Volynets, A.; Rakhimova, T.; Voloshin, D.; Chukalovsky, A.; Mankelevich, Yu; Guerra, V

Modification of Porous Ultralow-k Film by Vacuum UltravioletEmission

ACS APPLIED ELECTRONIC MATERIALS

IF4.7

2022-06-08

PREAI

Zotovich, Alexey, I; Zyryanov, Sergey M.; Lopaev, Dmitry, V; Rezvanov, Askar A.; Attallah, Ahmed G.; Liedke, Maciej O.; Butterling, Maik; Bogdanova, Maria A.; Vishnevskiy, Alexey S.; Seregin, Dmitry S.; Vorotyntsev, Dmitry A.; Palov, Alexander P.; Hirschmann, Eric; Wagner, Andreas; Naumov, Sergej; Vorotilov, Konstantin A.; Rakhimova, Tatyana, V; Rakhimov, Alexander T.; Baklanov, Mikhail R.

Experimental study of transition from electron beam to rf-power-controlled plasma in DFCCP in argon with additional ionization by an electron beam

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2022-05-23

PREAI

Zotovich, A., I; Lopaev, D., V; Bogdanova, M. A.; Zyryanov, S. M.; Rakhimov, A. T.

Effect of H atoms and UV wideband radiation on cured low-k OSG films

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2022-04-01

PREAI

Lopaev, D., V; Zotovich, A., I; Zyryanov, S. M.; Bogdanova, M. A.; Rakhimova, T., V; Mankelevich, Y. A.; Novikova, N. N.; Seregin, D. S.; Vishnevskiy, A. S.; Vorotilov, K. A.; Shi, Xiaoping; Baklanov, M. R.

'Virtual IED sensor' for df rf CCP discharges

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2021-07-08

OAAI

Bogdanova, M.; Lopaev, D.; Rakhimova, T.; Voloshin, D.; Zotovich, A.; Zyryanov, S.

Fast quenching of metastable O2(a1Δg) and O2(b1σg+) molecules by O(3P) atoms at high temperature

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2020-11-24

OAAI

Volynets, A. V.; Lopaev, D., V; Rakhimova, T., V; Proshina, O., V; Chukalovsky, A. A.; Booth, J. P.

Determination of absolute O(3P) and O2(a1Δg) densities and kinetics in fully modulated O2 dc glow discharges from the O2(X3σg-) afterglow recovery dynamics

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2020-11-14

OAAI

Booth, J-P; Chatterjee, A.; Guaitella, O.; Sousa, J. Santos; Lopaev, D.; Zyryanov, S.; Rakhimova, T.; Voloshin, D.; Mankelevich, Yu; de Oliveira, N.; Nahon, L.

VUV radiation flux from argon DC magnetron plasma

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2020-05-21

PREAI

Pal, A. F.; Ryabinkin, A. N.; Serov, A. O.; Lopaev, D., V; Mankelevich, Yu A.; Rakhimov, A. T.; Rakhimova, T., V; Baklanov, M. R.

Electron energy probability function in plasma controlled by high-energy run-away electrons

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2020-02-24

PREAI

Lopaev, D., V; Bogdanova, M. A.; Volynets, A. V.; Zotovich, A., I; Zyryanov, S. M.

Damage to porous SiCOH low-k dielectrics by O, N and F atoms at lowered temperatures

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2020-02-24

PREAI

Lopaev, D., V; Zyryanov, S. M.; Zotovich, A., I; Rakhimova, T., V; Mankelevich, Yu A.; Voronina, E. N.

Ion composition of rf CCP in Ar/H2 mixtures

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2019-09-24

PREAI

Bogdanova, Maria; Lopaev, Dmitry; Zyryanov, Sergey; Voloshin, Dmitry; Rakhimova, Tatyana

Volume and surface loss of O(3P) atoms in O2 RF discharge in quartz tube at intermediate pressures (10-100 Torr)

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2019-07-22

PREAI

Volynets, A. V.; Lopaev, D., V; Zyryanov, S. M.; Bogdanova, M. A.; Rakhimov, A. T.

Oxygen (3P) atom recombination on a Pyrex surface in an O2 plasma O2等离子体中Pyrex表面上的氧 (3p) 原子重组

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2019-05-08

OAAI

Booth, J. P.; Guaitella, O.; Chatterjee, A.; Drag, C.; Guerra, V; Lopaev, D.; Zyryanov, S.; Rakhimova, T.; Voloshin, D.; Mankelevich, Yu

研究方向