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Wataru Mizubayashi

national institute of advanced industrial science & technology (aist)
H指数:21
被引数:1,798

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Breakthrough in 19 nm half-pitch W damascene interconnects using nanoimprint lithography and atomic-scale processing

采用纳米压印光刻和原子级加工实现19 nm半间距W镶嵌互连技术的突破

2026-04-300
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