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SaveAn H-Shaped Piezoelectric MEMS Dual-Axis Accelerometer
Liu, Lei; Liu, Zesheng; Mo, Chengxiao; Huang, Xiaoming; Wei, Min; Qu, Yuanhang; Gu, Xiyu; Liu, Yan; Wang, Shengxiang; Sun, Chengliang
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SaveParallel Cross-sectional Lamé Mode Rod Resonator with high effective electromechanical coupling coefficient and temperature stability
Li, Haiyang; Zhou, Jie; Xu, Qinwen; Lin, Binghui; Yang, Tingting; Liu, Zesheng; Zheng, Yupeng; Huang, Xiaoming; Liu, Yan; Guo, Shishang; Cai, Yao; Sun, Chengliang
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SaveA Robust Thin-Film Encapsulation for RF-MEMS With Aluminum Nitride/Molybdenum Cap
Chen, Xiang; Liu, Yan; Gu, Xiyu; Wang, Shengxiang; Ding, Jiaqi; Zeng, Min; Don, Cheam Daw; Cai, Yao; Guo, Shishang; Sun, Chengliang
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