Gwang-Seok Chae - Publications, H-index & Citations

Gwang-Seok Chae

korea research institute of standards & science (kriss)

5H指数

23论文数

61被引数

收录论文 7

发表时间

Plasma Knowledge-Based Polymorphic Engineering for Two-Dimensional Semiconductor Contacts 基于等离子体知识的二维半导体接触多形性工程

ACS Nano

IF16

2026-02-11

PREAI

Ji Won Heo; Gwang-Seok Chae; Gyeong Deok Seo; Dong Hyun Seo; Gi Dan Shim; Han-Woong Choi; Jin-Hoo Seong; Jae-Heon Lee; Hagyoul Bae; Sungjune Park; Hyo-Chang Lee; TaeWan Kim

Tabletop extreme ultraviolet test platform for optical property evaluation of lithography materials 用于光刻材料光学特性评价的桌面式极紫外测试平台

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

IF1.2

2026-01-01

PREAI

Choe, Eun-Seok; Kim, Wooram; Kim, Young-Gi; Hwang, Do-Yeon; Yeom, Hee-Jung; Seong, Jin-Hoo; Chae, Gwang-Seok; Lee, Hyo-Chang; Jeong, Hyun-Dam; Chegal, Won; Kim, Dong-Wook; Kim, Jung-Hyung

Analysis of uncertainty in measurement of electron temperature in low-pressure inductively coupled plasmas using microwave cutoff probe 微波截止探头测量低压电感耦合等离子体电子温度的不确定度分析

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2024-11-19

PREAI

Yeom, Hee-Jung; Chae, Gwang-Seok; Kim, Jung-Hyung; Lee, Hyo-Chang

Development of a flat cutoff probe covered with a dielectric layer for non-invasive plasma diagnostics 开发覆盖有介电层的平面截止探针，用于非侵入性等离子体诊断

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2024-11-05

PREAI

Chae, Gwang-Seok; Yeom, Hee-Jung; Yoon, Min Young; Kim, Jung-Hyung; Lee, Hyo-Chang

Unintended gas breakdowns in narrow gaps of advanced plasma sources for semiconductor fabrication industry 用于半导体制造行业的先进等离子体源的狭窄间隙中的意外气体击穿

APPLIED PHYSICS LETTERS

IF3.6

2023-12-05

OAAI

Son, Sung Hyun; Go, Geunwoo; Villafana, Willca; Kaganovich, Igor D.; Khrabrov, Alexander; Lee, Hyo-Chang; Chung, Kyoung-Jae; Chae, Gwang-Seok; Shim, Seungbo; Na, Donghyeon; Kim, June Young

Influence of plasma parameters on low-k SiCOH film grown by plasma-enhanced chemical vapor deposition using dimethyldimethoxysilane 等离子体参数对使用二甲基二甲氧基硅烷通过等离子体增强化学气相沉积生长的低k SiCOH膜的影响

VACUUM

IF3.9

2023-11-01

OAAI

Choi, Jinseok; Yeom, H. J.; Chae, Gwang-Seok; Kee, Wonchul; Kim, Kwan-Yong; Lee, Hyo-Chang; Jeong, Hyun-Dam; Kim, Jung-Hyung

Real-time monitoring of the plasma density distribution in low-pressure plasmas using a flat-cutoff array sensor 使用平面截止阵列传感器实时监测低压等离子体中的等离子体密度分布

APPLIED PHYSICS LETTERS

IF3.6

2023-03-16

OAAI

Yeom, H. J.; Yoon, Min Young; Chae, Gwang-Seok; Kim, Jung Hyung; You, ShinJae; Lee, Hyo-Chang

研究方向