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Youngkwang Lee

Yonsei University

4H指数
12论文数
59被引数
收录论文 2
发表时间
Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing
err2008-01-10
err22
PREAI
errLee, Kyeonghyo; Lee, Youngkwang; Jo, Sungwon; Chung, Chin-Wook; Godyak, Valery
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