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H

Heta-Elisa Nieminen

University of Helsinki

7H指数
15论文数
174被引数
收录论文 7
发表时间
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In vacuo investigation of atomic layer deposition of HfO2 thin films on TiN: A low energy ion scattering and x-ray photoelectron spectroscopy study of interface evolution真空中HfO2薄膜在TiN上的原子层沉积研究：界面演化的低能离子散射和X射线光电子能谱研究
errJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
err2026-05-01
err0
PREAI
errChundak, Mykhailo; Nieminen, Heta-Elisa; Vehkamaki, Marko; Keranen, Laura; Putkonen, Matti; Ritala, Mikko
err分享
err收藏
In vacuo studies on reaction mechanisms in ALD processes of ruthenium and platinum films在真空中研究钌和铂膜的ALD过程中的反应机理
errAPPLIED SURFACE SCIENCE
IF6.9
err2024-03-01
err4
errOAAI
errNieminen, Heta-Elisa; Putkonen, Matti; Ritala, Mikko
err分享
err收藏
Reductive Thermal Atomic Layer Deposition Process for Gold金的还原热原子层沉积工艺
erracs nanoscience au
IF6.5
err2023-01-11
err6
errOAAI
errVihervaara, Anton; Hatanpaa, Timo; Nieminen, Heta-Elisa; Mizohata, Kenichiro; Chundak, Mykhailo; Ritala, Mikko
err分享
err收藏
In Situ Reaction Mechanism Study on Atomic Layer Deposition of Intermetallic Co3Sn2 Thin Films原子层沉积金属间化合物Co3Sn2薄膜的原位反应机理研究
errCHEMISTRY OF MATERIALS
IF7
err2020-09-14
err7
PREAI
errNieminen, Heta-Elisa; Kaipio, Mikko; Ritala, Mikko
err分享
err收藏
Atomic Layer Deposition of Photoconductive Cu2O Thin Films光导Cu2O薄膜的原子层沉积
errACS OMEGA
IF4.3
err2019-06-27
err45
errOAAI
errIivonen, Tomi; Heikkila, Mikko J.; Popov, Georgi; Nieminen, Heta-Elisa; Kaipio, Mikko; Kemell, Marianna; Mattinen, Miika; Meinander, Kristoffer; Mizohata, Kenichiro; Raisanen, Jyrki; Ritala, Mikko; Leskela, Markku
err分享
err收藏
Intercalation of Lithium Ions from Gaseous Precursors into β-MnO2 Thin Films Deposited by Atomic Layer Deposition
errJOURNAL OF PHYSICAL CHEMISTRY C
IF3.2
err2019-06-03
err12
errOAAI
errNieminen, Heta-Elisa; Miikkulainen, Ville; Settipani, Daniel; Simonelli, Laura; Hoenicke, Philipp; Zech, Claudia; Kayser, Yves; Beckhoff, Burkhard; Honkanen, Ari-Pekka; Heikkila, Mikko J.; Mizohata, Kenichiro; Meinander, Kristoffer; Ylivaara, Oili M. E.; Huotari, Simo; Ritala, Mikko
err分享
err收藏
In Vacuo Studies on the Mechanism of Inherently Area-Selective Atomic Layer Deposition of Iridium在真空条件下对固有面积选择性铱原子层沉积机理的研究
errChemistry of Materials
IF7
err
err0
errOAAI
errHeta-Elisa Nieminen; Matti Putkonen; Mikko Ritala
err分享
err收藏

研究方向

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合作学者
合作期刊
M
Markku Leskelä
H 指数: 89 · 论文数: 1.2K
M
Mikko Ritala
H 指数: 84 · 论文数: 740
M
Marianna Kemell
H 指数: 53 · 论文数: 237
M
Matti Putkonen
H 指数: 44 · 论文数: 218
S
Simo Huotari
H 指数: 41 · 论文数: 222
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