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科言猫学术研究的AI总结
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T

Tetsuya Tatsumi

Keio University

22H指数
96论文数
1.7K被引数
收录论文 3
发表时间
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Molecular dynamics simulation of silicon oxidation enhanced by energetic hydrogen ion irradiation高能氢离子辐照增强硅氧化的分子动力学模拟
errJOURNAL OF PHYSICS D-APPLIED PHYSICS
IF3.2
err2015-03-25
err19
PREAI
errMizotani, Kohei; Isobe, Michiro; Fukasawa, Masanaga; Nagahata, Kazunori; Tatsumi, Tetsuya; Hamaguchi, Satoshi
err分享
err收藏
Workshop on atomic and molecular collision data for plasma modelling: database needs for semiconductor plasma processing
errPLASMA SOURCES SCIENCE & TECHNOLOGY
IF3.3
err2011-04-01
err7
PREAI
errMakabe, Toshiaki; Tatsumi, Tetsuya
err分享
err收藏
Mechanism of highly selective SiO2 contact hole etching
errPLASMA SOURCES SCIENCE & TECHNOLOGY
IF3.3
err2002-08-21
err7
PREAI
errMatsui, M; Tatsumi, T; Sekine, M
err分享
err收藏

研究方向

暂时未获取到该数据
合作学者
合作期刊
S
Satoshi Hamaguchi
H 指数: 47 · 论文数: 432
T
Toshiaki Makabe
H 指数: 38 · 论文数: 329
M
Makoto Sekine
H 指数: 32 · 论文数: 514
M
Masanaga Fukasawa
H 指数: 20 · 论文数: 85
K
Kazunori Nagahata
H 指数: 16 · 论文数: 42
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