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Su Min Hwang

university of texas system
H指数:12
被引数:457

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In Situ Analysis of Electron-Induced Chemical Transformations in Vapor-Phase-Synthesized Al-Based Inorganic-Organic Hybrid Thin Films for EUV Resist Platform

原位分析气相法制备的Al基无机-有机杂化薄膜中电子诱导的化学转化，用于EUV抗蚀剂平台

ACS APPLIED MATERIALS & INTERFACES
IF8.2
2025-03-140
PRE
Le, DN; Lee, WI; Hwang, SM; Subramanian, A; Tiwale, N; Woo, J; Veyan, JF; Al-Mahboob, A; Sadowski, JT; Kim, JH; Chu, TTH; Kim, DS; Lee, MJ; Choi, R; Ahn, J; Sung, MM; Nam, CY; Kim, J
Investigation of the Physical Properties of Plasma Enhanced Atomic Layer Deposited Silicon Nitride as Etch Stopper

等离子体增强原子层沉积氮化硅作为刻蚀阻挡层的物理性能研究

ACS APPLIED MATERIALS & INTERFACES
IF8.2
2018-11-2832
PREAI
Kim, Harrison Sejoon; Meng, Xin; Kim, Si Joon; Lucero, Antonio T.; Cheng, Lanxia; Byun, Young-Chul; Lee, Joy S.; Hwang, Su Min; Kondusamy, Aswin L. N.; Wallace, Robert M.; Goodman, Gary; Wan, Alan S.; Telgenhoff, Michael; Hwang, Byung Keun; Kim, Jiyoung

研究方向

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J
Jiyoung Kim
H 指数:55论文数:509被引数:1.2万
H
Harrison Sejoon Kim
H 指数:13论文数:33被引数:505
S
Si Joon Kim
H 指数:26论文数:98被引数:2,543
Y
Yong Chan Jung
H 指数:15论文数:85被引数:871
C
Chee Won Chung
H 指数:18论文数:182被引数:1,373
J
Jaidah Mohan
H 指数:15论文数:35被引数:1,313
X
Xin Meng
H 指数:16论文数:48被引数:752
Y
Youngchul Byun
H 指数:21论文数:84被引数:1,625
A
Akshay Sahota
H 指数:6论文数:10被引数:128
J
Jin-Hyun Kim
H 指数:17论文数:135被引数:1,163