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M

Marko Vehkamäki

University of Helsinki

29H指数
105论文数
2.2K被引数
收录论文 37
发表时间
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Atomic Layer Deposition of Metallic Molybdenum Dioxide Thin Films Enabling High-k Rutile Capacitors (Adv. Mater. Interfaces 14/2026)原子层沉积法制备金属二氧化钼薄膜，实现高介电常数金红石电容器 (Adv. Mater. Interfaces 14/2026)
errAdvanced Materials Interfaces
IF4.4
err2026-08-18
err0
errOAAI
errAlexey Ganzhinov; Miika Mattinen; Marko Vehkamäki; Kenichiro Mizohata; Mykhailo Chundak; Georgi Popov; Paavo Porri; Mikko Ritala; Matti Putkonen
err分享
err收藏
In vacuo investigation of atomic layer deposition of HfO2 thin films on TiN: A low energy ion scattering and x-ray photoelectron spectroscopy study of interface evolution真空中HfO2薄膜在TiN上的原子层沉积研究：界面演化的低能离子散射和X射线光电子能谱研究
errJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
err2026-05-01
err0
PREAI
errChundak, Mykhailo; Nieminen, Heta-Elisa; Vehkamaki, Marko; Keranen, Laura; Putkonen, Matti; Ritala, Mikko
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err收藏
Self-aligned patterning by area-selective etching of polymers and area-selective atomic layer deposition: Decreasing polymer flow and activating noncatalytic surface通过聚合物区域选择性刻蚀和区域选择性原子层沉积的自对准图案化：降低聚合物流动并激活非催化表面
errJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
err2026-05-01
err0
PREAI
errLasonen, Valtteri; Liyana Pathiranage, Piyumi; Chundak, Mykhailo; Vehkamaki, Marko; Carnoy, Matthias; Borie, Benjamin; Armini, Silvia; Ritala, Mikko
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Cell-Mediated Mechanical Stability Enhancement of Biomimetic Collagen-Alginate Hydrogels: A Mechanistic Study on the Two-Dimensional Extracellular Matrix–Cell Interaction细胞介导的仿生胶原-海藻酸盐水凝胶机械稳定性增强：关于二维细胞外基质-细胞相互作用的机制研究
errChemistry of Materials
IF7
err2026-04-05
err0
errOAAI
errShuhan Feng; Sami Hietala; Juan José Valle-Delgado; Marko Vehkamäki; Alexandra Correia; Shiqi Wang
err分享
err收藏
Atomic Layer Deposition of Metallic Molybdenum Dioxide Thin Films Enabling High-k Rutile Capacitors金属二氧化钼薄膜的原子层沉积技术实现高介电常数金红石电容器
errAdvanced Materials Interfaces
IF4.4
err2026-04-01
err0
errOAAI
errGanzhinov, Alexey; Mattinen, Miika; Vehkamaki, Marko; Mizohata, Kenichiro; Chundak, Mykhailo; Popov, Georgi; Porri, Paavo; Ritala, Mikko; Putkonen, Matti
err分享
err收藏
Hollow-core wood hemicellulose-based microcapsules entrap probiotics within protective walls
errJournal of Colloid and Interface Science
IF9.7
err2026-02-19
err0
errOAAI
errThao M. Ho; Marko Vehkamäki; Lisbeth G. Thygesen; Heikki Suhonen; Per E.J. Saris; Kirsi S. Mikkonen
err分享
err收藏
Atomic layer etching of molybdenum with O2 and NbCl5使用O2和NbCl5对钼进行的原子层刻蚀
errJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
err2025-12-01
err0
PREAI
errOjala, Juha; Chundak, Mykhailo; Vihervaara, Anton; Vehkamaki, Marko; Ritala, Mikko
err分享
err收藏
Selective gas phase pulsed etching of oxides with NbCl5用NbCl5对氧化物进行选择性气相脉冲蚀刻
errJOURNAL OF MATERIALS CHEMISTRY C
IF5.1
err2025-01-01
err0
errOAAI
errOjala, Juha; Vehkamaeki, Marko; Chundak, Mykhailo; Vihervaara, Anton; Mizohata, Kenichiro; Ritala, Mikko
err分享
err收藏
3D-printed sensor electric circuits using atomic layer deposition使用原子层沉积的3d印刷传感器电路
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2024-05-01
err1
PREAI
errKestila, Antti; Vehkamaki, Marko; Nyman, Leo; Salmi, Mika; Lohilahti, Jarkko; Hatanpaa, Timo; Lafont, Ugo; Ritala, Mikko
err分享
err收藏
Atomic Layer Deposition of Boron-Doped Al2O3 Dielectric Films硼掺杂Al2O3介电薄膜的原子层沉积
errADVANCED MATERIALS INTERFACES
IF4.4
err2023-05-28
err2
errOAAI
errLi, Xinzhi; Vehkamaki, Marko; Chundak, Mykhailo; Mizohata, Kenichiro; Vihervaara, Anton; Leskela, Markku; Putkonen, Matti; Ritala, Mikko
err分享
err收藏
Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization氧化聚合法制备吡喃酮薄膜的分子层沉积
errADVANCED MATERIALS INTERFACES
IF4.4
err2023-01-22
err2
errOAAI
errGhafourisaleh, Saba; Vehkamaki, Marko; Vihervaara, Anton; Zhang, Chao; Heikkila, Mikko J.; Leskela, Markku; Putkonen, Matti; Ritala, Mikko
err分享
err收藏
Inherent area-selective atomic layer deposition of ZnSZnS的固有面积选择性原子层沉积
errDALTON TRANSACTIONS
IF3.3
err2023-01-01
err5
errOAAI
errZhang, Chao; Vehkamaki, Marko; Leskela, Markku; Ritala, Mikko
err分享
err收藏
Atomic Layer Deposition of CsI and CsPbI3CsI和CsPbI3的原子层沉积
errCHEMISTRY OF MATERIALS
IF7
err2022-06-27
err3
errOAAI
errWeiss, Alexander; Popov, Georgi; Atosuo, Elisa; Vihervaara, Anton; Jalkanen, Pasi; Vehkamaki, Marko; Leskela, Markku; Ritala, Mikko; Kemell, Marianna
err分享
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Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures热稳定的聚苯并咪唑类薄膜和纳米结构的分子层沉积
errADVANCED MATERIALS INTERFACES
IF4.4
err2022-04-07
err2
errOAAI
errGhafourisaleh, Saba; Hatanpaa, Timo; Vihervaara, Anton; Mizohata, Kenichiro; Vehkamaki, Marko; Leskela, Markku; Putkonen, Matti; Ritala, Mikko
err分享
err收藏
Highly Material Selective and Self-Aligned Photo-assisted Atomic Layer Deposition of Copper on Oxide Materials氧化物材料上铜的高材料选择性和自对准光辅助原子层沉积
errADVANCED MATERIALS INTERFACES
IF4.4
err2021-05-06
err6
errOAAI
errMiikkulainen, Ville; Vehkamaki, Marko; Mizohata, Kenichiro; Hatanpaa, Timo; Ritala, Mikko
err分享
err收藏
Atomic Layer Deposition of PbS Thin Films at Low Temperatures低温下PbS薄膜的原子层沉积
errCHEMISTRY OF MATERIALS
IF7
err2020-09-16
err28
errOAAI
errPopov, Georgi; Bacic, Goran; Mattinen, Miika; Manner, Toni; Lindstrom, Hannu; Seppanen, Heli; Suihkonen, Sami; Vehkamaki, Marko; Kemell, Marianna; Jalkanen, Pasi; Mizohata, Kenichiro; Raisanen, Jyrki; Leskela, Markku; Koivula, Hanna Maarit; Barry, Sean T.; Ritala, Mikko
err分享
err收藏
Area-Selective Molecular Layer Deposition of Polyimide on Cu through Cu-Catalyzed Formation of a Crystalline Interchain Polyimide通过Cu催化的结晶链间聚酰亚胺的形成，在Cu上进行聚酰亚胺的区域选择性分子层沉积
errCHEMISTRY OF MATERIALS
IF7
err2020-06-03
err26
errOAAI
errZhang, Chao; Vehkamaki, Marko; Pietikainen, Mika; Leskela, Markku; Ritala, Mikko
err分享
err收藏
Hydrogen release from liquid organic hydrogen carriers catalysed by platinum on rutile-anatase structured titania
errCHEMICAL COMMUNICATIONS
IF4.2
err2020-01-01
err41
errOAAI
errAakko-Saksa, P. T.; Vehkamaki, M.; Kemell, M.; Keskivali, L.; Simell, P.; Reinikainen, M.; Tapper, U.; Repo, T.
err分享
err收藏
Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for Optoelectronics用于光电子的新兴2D半导体HfS2和ZrS2的原子层沉积
errCHEMISTRY OF MATERIALS
IF7
err2019-08-02
err85
errOAAI
errMattinen, Miika; Popov, Georgi; Vehkamaki, Marko; King, Peter J.; Mizohata, Kenichiro; Jalkanen, Pasi; Raisanen, Jyrki; Leskela, Markku; Ritala, Mikko
err分享
err收藏
Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia
errJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
err2019-02-28
err5
PREAI
errMantymaki, Miia; Atosuo, Elisa; Heikkila, Mikko J.; Vehkamaki, Marko; Mattinen, Miika; Mizohata, Kenichiro; Raisanen, Jyrki; Ritala, Mikko; Leskela, Markku
err分享
err收藏

研究方向

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合作期刊
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H 指数: 89 · 论文数: 1.2K
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